OHC/OHB OHB(Overhead Hoist Buffer),即顶置起重机缓冲器,是AMHS系统中安装 […]
Carrier Status Monitor Tool Carrier Status Monitor Tool […]
DUMMY LOAD PORT 无尘室内8或12吋晶圆传送盒(FOUP – Cassete)的运输站,为抗静电 […]
300MM LOAD PORT 半汽缸半电动机台:提供更多动力辅助,大幅提升性能 硬件整合:机台自带APT E […]
N2 PURGE LOAD PORT(N2P) 运用在半导体厂内的设备机台,将Foup载具填充进惰性气体(氮气 […]