N2 PURGE LOAD PORT(N2P)
运用在半导体厂内的设备机台，将Foup载具填充进惰性气体(氮气N 2)，以降低晶圆氧化，及保持干燥状态，稳定FOUP内部环境
Product Name | N2/XCDA PURGE LOADPORT |
|---|---|
Model | APS-01301 |
Description | Nitrogen and XCDA filling equipment for 8-inch / 12-inch / Reticle carrier type, Extending Wafer storage time by controlling temperature and humidity in the carrier. |
Specifications | ・Conform to Semi E84 ・N2/XCDA purge Support Ready ・Status Indicator ・Display with touch screen ・RFID / SMART TAG data reader function ・PRESENCE / PLACEMENT Presence and Placement sensor as safety device ・OHT/Mobile Robot Support Ready ・SECS/GEM, TCP/IP Protocol or Data Base Report Ready ・Auto Charge for APS-Carrier Status Monitor Tool ・ Auto Data Download for APS-Carrier Status Monitor humidity Tool |
