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OHT 耗材

走行轮

缓冲器

上部导轮(BEARRING)

Side Roller

OHT 耗材

FIGURE 0-1 APT 震動監測儀

IR TAGID Read/Write Controller(TAG Reader)

Load port / OHT Track Aligner(Orbital calibrator)

SMART RFID(RFID)

Controller(standard)

E84 Sensor (PI/O)

E84 Sensor (RJ-11)

Controller(CFG)